Merit Sensor 5000 Series

The 5000 series high pressure MEMS sensing elements from Merit Sensor^TM is ideal for OEM applications, offering available pressure ranges of between 1,000psi and 10,000psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range of 125mV to 300mv (depending on the pressure range). The 5000 series from Merit Sensor^TM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

• High Pressure MEMS sensing elements
• Pressure ranges available 1,000psi, 3,000psi, 5,000psi and 10,000psi
• Absolute pressure type
• Temperature range −40°C to +150°C
• Typical full scale output (at 5V excitation) 125mV at 1,000psi, 180mV at 3,000psi, 200mV at 5,000psi and 1,000psi, 175mV at 500psi
• Impedance of 5kΩ (typical) or 3.5kΩ (optional)
• Suitable for clean, dry air and non-corrosive gases media
• Sawn wafer on tape in metal frame
• Bridge options of open, half open or closed
• AEC-Q100 qualification available upon request

Typical applications for the Merit Sensor^TM 5000 series include:

• Industrial
• Aerospace
• Automotive
• Consumer
• Medical

Please see below the specifications for the Merit Sensor^TM 5000 series: